Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A rotator circuit is constructed with more homogeneous interconnect than the standard logarithmic rotator. The circuit has improved data-in to data-out delay and similar control to data-out delay. The circuit is easily modified to support subfield rotate instructions.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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