Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Data exchange is the process of converting an instance of one schema into an instance of a different schema according to a given specification. Recent data exchange systems have largely dealt with the case where the schemas are given a priori and transformations can only migrate data from the first schema to an instance of the second schema. In particular, the ability to perform data-metadata translations, transformation in which data is converted into metadata or metadata is converted into data, is largely ignored. This paper provides a systematic study of the data exchange problem with data-metadata translation capabilities. We describe the problem, our solution, implementation and experiments. Our solution is a principled and systematic extension of the existing data exchange framework; all the way from the constructs required in the visual interface to specify data-metadata correspondences, which naturally extend the traditional value correspondences, to constructs required for the mapping language to specify data-metadata translations, and algorithms required for generating mappings and queries that perform the exchange. © 2008 VLDB Endowment.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Arun Viswanathan, Nancy Feldman, et al.
IEEE Communications Magazine
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004