Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In this study the role of anisotropy on flux penetration in c-axis epitaxial (Formula presented) and (Formula presented) films is investigated by magneto-optics. We study thin films of (Formula presented) on substrates with vicinal angles of 0° (well-oriented), (Formula presented) and (Formula presented) and (Formula presented) films as a function of chain-conduction-induced anisotropy. A crossover from fractal to nonfractal flux penetration is observed with increasing anisotropy. Numerical simulations of anisotropic flux motion are compared with experiment. © 1998 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules