William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Paper
Correlation effects in electron scattering and attachment by open‐shell atoms
Abstract
Low energy scattering or attachment of an electron by a neutral atom is dominated by the polarization potential, formally an electronic correlation effect. Special problems arise in the quantitative theory of this effect for open‐shell atoms. These problems are analyzed, and recent progress in resolving them is discussed. Copyright © 1977 John Wiley & Sons, Inc.
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