Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Modification of the refractive index of the region common to intersecting waveguides (fractional doping) provides a mechanism, independent of intersection angle, for controlling the optical coupling characteristics of this geometry. We derive a pair of expressions based on a multiple scattering analysis of intersecting waveguides which predict the coupling behavior as a function of intersection angle and fractional doping for both polarizations. The expressions are in good agreement with experimental data from several different laboratories. The conditions for polarization-independent coupling and polarization splitting are demonstrated. © 1991 IEEE.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Mark W. Dowley
Solid State Communications
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
Oliver Schilter, Alain Vaucher, et al.
Digital Discovery