Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
No abstract available.
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
A.R. Gourlay, G. Kaye, et al.
Proceedings of SPIE 1989
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004