Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A set of facilities for an algebra system that makes it possible to mampulate formal power series is described. Unlike many previous power series packages, the one presented here does not enforce any predetermined or arbitrary limits on the order of expansions generated. The system can deal with the elementary functions and copes gracefully with removable singularities of the form exemplified by t/sin(t) at t = 0. Examples of the use of the power series package are given; they were run on the SCRATCHPAD algebra system. © 1975, ACM. All rights reserved.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Robert F. Gordon, Edward A. MacNair, et al.
WSC 1985
Simeon Furrer, Dirk Dahlhaus
ISIT 2005
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008