Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
No abstract available.
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology