Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We consider algebraic functions that are rational functions of roots (of various degrees) of rational functions of indeterminates. We associate a cost C(d) with the extraction of a dth root and assume that C satisfies certain natural axioms. We show that the minimum cost of computing a finite set of algebraic functions of the form considered is C(d1) + ... + C(dr), where d1...dr are the torsion orders of the Galois group of the extension generated by the functions. © 1981.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Satoshi Hada
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences
Leo Liberti, James Ostrowski
Journal of Global Optimization
M. Shub, B. Weiss
Ergodic Theory and Dynamical Systems