Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
We consider algebraic functions that are rational functions of roots (of various degrees) of rational functions of indeterminates. We associate a cost C(d) with the extraction of a dth root and assume that C satisfies certain natural axioms. We show that the minimum cost of computing a finite set of algebraic functions of the form considered is C(d1) + ... + C(dr), where d1...dr are the torsion orders of the Galois group of the extension generated by the functions. © 1981.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
T. Graham, A. Afzali, et al.
Microlithography 2000
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989
Andrew Skumanich
SPIE Optics Quebec 1993