Z. Luo, T.P. Ma, et al.
International Symposium on VLSI Technology, Systems, and Applications, Proceedings
We have investigated the effects of Mn impurities on Ba0.7Sr0.3TiO3 thin films using x-ray photoemission spectroscopy. Mn acts as an electron acceptor, compensating for the charge density found in nominally undoped films. This causes a greatly increased depletion width in acceptor-doped films. We also present evidence that acceptor-doped films have an increased barrier to thermionic emission of electrons from Pt contacts into the dielectric. This may explain the decrease in leakage current observed in some acceptor-doped titanates. © 1998 American Institute of Physics.
Z. Luo, T.P. Ma, et al.
International Symposium on VLSI Technology, Systems, and Applications, Proceedings
J.D. Baniecki, C. Parks, et al.
MRS Online Proceedings Library
J.Z. Sun, L. Krusin-Elbaum, et al.
Applied Physics Letters
M. Horn-Von Hoegen, J. Falta, et al.
Applied Physics Letters