COMPARATIVE MEASUREMENTS OF PLASMA O ATOM CONCENTRATION BY SIMULTANEOUS TWO-PHOTON LASER-INDUCED FLUORESCENCE AND OPTICAL EMISSION ACTINOMETRY.

Abstract

Atomic oxygen is an important reactive constituent of plasmas used in processing semiconductor and organic materials. Emission spectroscopy provides a convenient means for in-situ monitoring of plasma species but its proper application requires the use of a suitable actinometer to correct for changes in electron-induced excitation. Reported are the first direct comparison of optical emission actinometry and two-photon laser-induced fluorescence (TPLIF) in O//2/CF//4 rf plasmas.