Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
In this paper various ways of constructing locally supported fundamental splines leading to highly accurate local interpolation schemes are proposed and analyzed. © 1988 Springer-Verlag.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
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Microlithography 2000
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002
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Ergodic Theory and Dynamical Systems