Publication
Review of Scientific Instruments
Paper

Compact, combined scanning tunneling/force microscope

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Abstract

We have built a combined scanning tunneling and scanning force microscope. Owing to the compact design of the instrument with Nomarski type of interferometry for lever deflection sensing, we achieved excellent stability with a total rms noise of 0.03-0.04 Å in a frequency bandwidth of 0.01 Hz-2 kHz and a spectral noise density of 2.0×10-4 Å/ √Hz at higher frequencies (>2 kHz) using cantilevers with compliances of ∼150 N m-1. Simultaneous measurement of constant current contours, the acting forces, and the system compliance allows separation of sample topography from electronic and elastic effects.

Date

01 Dec 1992

Publication

Review of Scientific Instruments

Authors

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