Yurii A. Vlasov, William M. J. Green, et al.
GFP 2008
Paper
CMOS-integrated high-speed MSM germanium waveguide photodetector
Abstract
A compact waveguide-integrated Germanium-on-insulator (GOI) photodetector with 10 ± 2fF capacitance and operating at 40Gbps is demonstrated. Monolithic integration of thin single-crystalline Ge into frontend CMOS stack was achieved by rapid melt growth during source-drain implant activation anneal. ©2010 Optical Society of America.
Related
Wesley D. Sacher, William M. J. Green, et al.
Optics Express
Conference paper
CMOS integrated silicon nanophotonics for exascale computing
William M. J. Green, Solomon Assefa, et al.
FiO 2011
Hugen Yan, Tony Low, et al.
Nano Letters