Publication
Microelectronic Engineering
Paper

Characterization of stress in the absorber of x-ray masks using a holographic technique

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Abstract

The distortion of X-ray masks is directly related to the stress of the absorber used. Because of this, it is very important be able to determine the value of the absorber stress in order to be able to control, or reduce, the distortion of the masks. A simple technique, double exposure holographic interferometry, is described. Its application in measuring the stress of electrodeposited gold films, and the effect that several deposition parameters have on the gold stress are described. © 1985.

Date

01 Jan 1985

Publication

Microelectronic Engineering

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