Novel low-k dual-phase materials prepared by PECVD
A. Grill, V.V. Patel
MRS Proceedings 2000
Comparison of Fourier transform infrared (FTIR) absorption spectroscopy, high resolution 13C nuclear magnetic resonance spectroscopy, and hydrogen evaluation by forward recoil elastic scattering (FRES) measurements shows that FTIR cannot be used to determine the carbon hybridization or total hydrogen content of diamondlike carbon films (DLC). FTIR absorption reflects only the optically active hydrogen in the DLC and, using it together with FRES, it can provide an estimate of the unbound hydrogen contained in the films. The fraction of unbound hydrogen can reach values of up to ∼50%.
A. Grill, V.V. Patel
MRS Proceedings 2000
J. Fontaine, C. Donnet, et al.
Surface and Coatings Technology
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989
Son Nguyen, Eric Liniger, et al.
ECS Meeting 2007