R.B. Laibowitz, C.C. Tsuei, et al.
IEEE Transactions on Magnetics
Paper
Channeling of ions near the silicon 〈001〉 axis
Abstract
The first experimental mapping of ion beam channels near the Si 〈001〉 axis is reported. All features are identified by theoretical plots of silicon planar channels and axial channels.
Related
J.J. Cuomo, J.F. Ziegler, et al.
Applied Physics Letters
H.H. Andersen, K.N. Tu, et al.
Nuclear Instruments and Methods
M.H. Brodsky, D. Kaplan, et al.
Applied Physics Letters