J.F. Ziegler
IBM J. Res. Dev
Paper
Channeling of ions near the silicon 〈001〉 axis
Abstract
The first experimental mapping of ion beam channels near the Si 〈001〉 axis is reported. All features are identified by theoretical plots of silicon planar channels and axial channels.
Related
J.F. Ziegler
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
J.F. Ziegler, G.W. Cole, et al.
Journal of Applied Physics
W.K. Chu, J.F. Ziegler, et al.
Applied Physics Letters