B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
Paper
Ceramics in microelectronics
Abstract
Ceramics, both crystalline and amorphous, as used today for such applications as processing, tranferring, storing, printing and displaying information are reviewed. State of the art in materials and processes as well as challenges that need to be met to support the growth of the industry are discussed. © 1987.