Albert E. Ruehli, Hansruedi Heeb
IEEE T-MTT
Paper
Capacitance Models for Integrated Circuit Metallization Wires
Abstract
New concepts are introduced relating aspects of circuit theory to the multicapacitances which can be obtained from a computer program for multiconductor geometries. These concepts are applied to the wiring of an integrated circuit chip. Capacitances are found for crossovers, vias, and right angle bends for a realistic geometry. Copyright © 1975 by The Institute of Electrical and Electronics Engineers, Inc.
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