Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The characteristics of miniaturized microfabricatd cantilever array sensors are discussed. The sensor arrays can be used during an ultrasensitive mechanical way of converting (bio-) chemical or physical processes into a recordable signals. Alongwith enthalpy changes during phase transition, cantilever sensor array techniques help to study physisorption and chemisorption processes. Miniaturized cantilever sensors can be operated in vacuum, air or liquid mediums and fast response times, high sensitivity and direct transduction without any label are their major advantages.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Michiel Sprik
Journal of Physics Condensed Matter
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983