J.Z. Sun
Journal of Applied Physics
The characteristics of miniaturized microfabricatd cantilever array sensors are discussed. The sensor arrays can be used during an ultrasensitive mechanical way of converting (bio-) chemical or physical processes into a recordable signals. Alongwith enthalpy changes during phase transition, cantilever sensor array techniques help to study physisorption and chemisorption processes. Miniaturized cantilever sensors can be operated in vacuum, air or liquid mediums and fast response times, high sensitivity and direct transduction without any label are their major advantages.
J.Z. Sun
Journal of Applied Physics
K.A. Chao
Physical Review B
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997