R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
No abstract available.
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Robert Manson Sawko, Malgorzata Zimon
SIAM/ASA JUQ