PaperSome methods for producing straight achromatic white-light fringes of variable contrast and constant average irradianceDouglas S. GoodmanApplied Optics
Conference paperBench evaluation of lithographic lenses from measurements of the point spread functionNorman Bobroff, Petra Fadi, et al.Proceedings of SPIE 1989
PaperThe Phase-Shifting Mask II: Imaging Simulations and Submicrometer Resist ExposuresMarc D. Levenson, Scott Lindsey, et al.IEEE T-ED