Publication
MicroTAS 2005
Conference paper
Assembly and printing of micro and nano objects
Abstract
Functional particles are versatile carriers in biochemisty and potential building blocks for future microelectronic and photonic devices. The integration of particles into planar system devices is desirable but uncommon in current microtechnology. Here, we introduce a process to order and integrate particles, in a microfabrication-compatible fashion, that combines Self-Assembly, Transfer and Integration (SATI). Self-assembly first orders the particles, which are then integrated by means of an adhesion cascade. SATI does not require patterned substrates and is versatile in terms of both particle size and material. Copyright © 2005 by the Transducer Research Foundation, Inc.