John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
No abstract available.
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
Imran Nasim, Michael E. Henderson
Mathematics
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991