Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A doubly iterative procedure for computing optimal controls in linear systems with convex cost functionals is presented. The procedure is based on an algorithm due to Gilbert [3] for minimizing a quadratic form on a convex set. Each step of the procedure makes use of an algorithm due to Neustadt and Paiewonsky [1] to solve a strictly linear optimal control problem. Copyright © 1970 by The Institute of Electrical and Electronics Engineers, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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IEEE Communications Magazine
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Proceedings of SPIE - The International Society for Optical Engineering