Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
We show how to replace the point functional of numerical analysis with types of stable functional of highly oscillatory solutions of differential equations. This replacement leads to the development of effective numerical methods for the stiff highly oscillatory problem. © 1976, American Mathematical Society.
J. LaRue, C. Ting
Proceedings of SPIE 1989
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