Publication
EUVL 2019
Conference paper

An analysis of EUV resist stochastic printing failures

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Abstract

A simple physicochemical description of stochastic printing failures is discussed. By combining this with combinatorial calculations of resist imaging chemistry and Monte Carlo analysis, estimates of the rates of random printing failures in nanoscale lithography can be made. This approach, based solely on component and photon statistics, provides results consistent with experimental reports. The method provides a general framework for predicting impacts of resist formulation, compositional and process changes on printing failures.

Date

16 Sep 2019

Publication

EUVL 2019

Authors

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