Conference paper
Lactones in 193 nm resists: What do they do?
Hiroshi Ito, Hoa D. Truong, et al.
SPIE Advanced Lithography 2008
No abstract available.
Hiroshi Ito, Hoa D. Truong, et al.
SPIE Advanced Lithography 2008
Christoph Berger, Marcel A. Kossel, et al.
SPIE Photonics Fabrication Europe 2002
Yuksel Temiz, Jelena Skorucak, et al.
SPIE Photonics West 2014
R.E. Tibbetts, J.S. Wilczynski
Proceedings of SPIE 1989