L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Bisphenol‐A polysulfone, poly(oxy‐1,4‐phenylenesulfonyl‐1,4‐phenyleneoxy‐1, 4‐phenyleneisopropylidene‐1,4‐phenylene), PSF (I) showed greatly reduced resistance to electron beam irradiation when subjected simultaneously to an applied tensile stress. The creep rate increased, and the time (dose) to failure of the sample decreased with increasing stress. The failure strain was constant for different applied stresses. Air, oxygen, and moisture caused decreases in radiation resistance compared with a dry nitrogen atmosphere. Increasing the irradiation temperature from 0 to 90°C resulted in substantially decreased radiation resistance. Copyright © 1992 John Wiley & Sons, Inc.
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007