Maskless laser plating techniques for microelectronic materials
R.J. Von Gutfeld, M.H. Gelchinski, et al.
Proceedings of SPIE 1989
The design, fabrication and output characteristics of a thin film Permalloy magnetoresistive magnetic field sensor in a balanced bridge configuration are described. The bridge elements consist of two magnetostatically coupled Permalloy films (100 to 500 A°) separated by a thin film titanium spacer (100 to 1,000 A°). When this bridge is integrated with electrically isolated overlay conductors, the resulting device is ideally suited to sense currents in power supply applications over a 0 to 100 MHz frequency range with negligible dc offset. Devices with 35 mV peak outputs optimized to sense 50, 250 and 500 mA peak currents have been implemented and tested. Copyright © 1976 by The Institute of Electrical and Electronics Engineers, Inc.
R.J. Von Gutfeld, M.H. Gelchinski, et al.
Proceedings of SPIE 1989
P.C. Andricacos, K.H. Wong, et al.
ECS Meeting 1989
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