Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
A note on maximizing a submodular set function subject to a knapsack constraint was presented. An (1-e-1)-approximation algorithm for maximizing a nondecreasing submodular set function was obtained. This algorithm required O(n5) function value computations. The algorithm enumerated all feasible solutions of cardinality one or two.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Trang H. Tran, Lam Nguyen, et al.
INFORMS 2022
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Andrew Skumanich
SPIE Optics Quebec 1993