Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009