Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The authors derive a highly vectorising Green function recursion algorithm and a finite-size scaling description for diffusion in two-dimensional disordered systems. Extensive numerical calculations are presented for two different types of distribution function for the transfer rates between nearest-neighbour sites. The data are in good agreement with the dimensional crossover and scaling behaviour analytically predicted. Additionally, in contrast with one-dimensional systems with a box-shaped distribution of transition rates, they find no evidence for quasi-localisation. © 1988 American Institute of Physics.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Julien Autebert, Aditya Kashyap, et al.
Langmuir