Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
A cyclic voltammetric method is described that allows the evaluation of catalysts for electroless deposition. Information about the chemical state and activity of the catalytic layers can be inferred from the measurements. Differences are illustrated between Pd deposited on Cu through electrochemical exchange, a two-step procedure using SnCl2 and PdCl2, and a one-step activation with a Pd-Sn colloid. The method is sensitive to small differences between colloids of similar structure. It has been used to investigate the effect of varying solution composition during synthesis of Pd-Sn colloids. XPS and electron microprobe analysis have supported the conclusions of the electrochemical measurements. © 1983, The Electrochemical Society, Inc. All rights reserved.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films