Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
On a given Riemann surface, fix a discrete (finite or infinite) sequence of points {Pk}, k = 1, 2, 3,…, and associate to each Pk an “integer” vk (which may be 1, 2, 3,…, or ∞). This sequence of points and “integers” is called a “signature” on the Riemann surface. With only a few exceptions, a Riemann surface with signature can always be represented by a Fuchsian group. We investigate here the dependence of the group on the number vk. More precisely, keeping the points Pk fixed, we vary the numbers vk in such a way that the signature tends to a limit signature. We shall prove that the corresponding representing Fuchsian group converges to the Fuchsian group which corresponds to the limit signature. © 1972 American Mathematical Society.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998