Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The construction of a class of balanced binary sequences with optimal autocorrelation properties is described. Given any odd prime p and any positive integer m, a balanced (±1) binary sequence of length pm − 1 whose cyclic autocorrelation function c(τ) satisfies c(0) = pm − 1, and, for τ ≠ 0, c(τ) = +2 or −2 when (pm − 1)/2 is odd, and c(τ) = 0 or −4 when (pm − 1)/2 is even is constructed. Optimality is proved by showing that every balanced binary sequence has at least two distinct out-of-phase correlation values which are at least as large as those obtained here. © 1977, IEEE. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Rolf Clauberg
IBM J. Res. Dev
Preeti Malakar, Thomas George, et al.
SC 2012
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University