Publication
QELS 2003
Conference paper

3D and 2D silicon photonic crystals for microphotonic circuits

Abstract

Photonic crystals might offer a unique solution for building ultradense photonic integrated circuits. Recent achievements in fabrication of silicon photonic crystals compatible with microelectronics processing will be reported. ©2003 Optical Society of America.

Date

Publication

QELS 2003

Authors

Share