William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
J. Tersoff
Applied Surface Science
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
T. Schneider, E. Stoll
Physical Review B