Cyclophosphazene-containing polymers as imprint lithography resists
- Erik C. Hagberg
- Mark W. Hart
- et al.
- 2007
- Journal of Inorganic and Organometallic Polymers and Materials
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.