Methodology for trench capacitor etch optimization using voltage contrast inspection and special processing
- Oliver D. Patterson
- Xing J. Zhou
- et al.
- 2010
- ASMC 2010
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3 results at ASMC 2010
Voltage contrast test structure for measurement of mask misalignment
- Oliver D. Patterson
- Roland Hahn
- et al.
- 2010
- ASMC 2010
Characterization of contact module failure mechanisms for SOI technology using E-beam inspection and in-line TEM
- Xing J. Zhou
- Oliver D. Patterson
- et al.
- 2010
- ASMC 2010