Interferometer for phase measurements in phase shift masks
- Derek B. Dove
- Trieu C. Chieu
- et al.
- 1992
- BACUS Symposium on Photomask Technology and Management 1992
Conference paper
Publications
2 results at BACUS Symposium on Photomask Technology and Management 1992
Real and imaginary phase-shifting masks
- F.M. Schellenberg
- M. Levenson
- 1992
- BACUS Symposium on Photomask Technology and Management 1992
Conference paper