Theory for electromigration failure in Cu conductors
- J.R. Lloyd
- C.E. Murray
- et al.
- 2005
- International Workshop on Stress-Induced Phenomena in Metallization 2005
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2 results at International Workshop on Stress-Induced Phenomena in Metallization 2005
Thermal and electromigration-induced strains in polycrystalline films and conductor lines: X-ray microbeam measurements and analysis
- G.S. Cargill III
- L.E. Moyer
- et al.
- 2005
- International Workshop on Stress-Induced Phenomena in Metallization 2005