Publications

3 results at MRS Spring Meeting 2007

Effects of environment on modulus of low-k porous films used in back end of line
- - Eva E. Simonyi
  - Christos D. Dimitrakopoulos
  - et al.
- 2007
- MRS Spring Meeting 2007
Application of scatterometry to BEOL measurements: Post Cu CMP measurements
- - Deepak Kulkarni
  - Shorn Ponoth
  - et al.
- 2007
- MRS Spring Meeting 2007
Improved electromigration lifetime for copper interconnects using tantalum implant
- - Jeff Gambino
  - Timothy D. Sullivan
  - et al.
- 2007
- MRS Spring Meeting 2007