A test structure for assessing individual contact resistance
- Frank Liu
- Kanak Agarwal
- 2009
- ICMTS 2009
Conference paper
Publications
2 results at ICMTS 2009
Addressable arrays implemented with one metal level for MOSFET and resistor variability characterization
- Mark B. Ketchen
- Manjul Bhushan
- et al.
- 2009
- ICMTS 2009
Conference paper