Publications

2 results at ADMETA 2007

Optimized interfacial strength for dense and porous SiCOH
- - D.D. Restaino
  - Steve Molis
  - et al.
- 2007
- ADMETA 2007
Conference paper
A multilevel copper/low-k/airgap BEOL technology
- - S.V. Nitta
  - S. Ponoth
  - et al.
- 2007
- ADMETA 2007
Conference paper