Publications

2 results at ADMETA 2001

An optimal liner for copper damascene interconnects
- - D. Edelstein
  - C. Uzoh
  - et al.
- 2001
- ADMETA 2001
SiCOH dielectrics: From low-κ to Ultralow-κ by PECVD
- - A. Grill
  - D. Edelstein
  - et al.
- 2001
- ADMETA 2001