Flowable Chemical Vapor Deposition of Lightly Porous Low k SiCOH Dielectrics—Remote Plasma Deposition Processing, Film Analysis and Gap-Fill Application in Nano Device Fabrication
- Son Nguyen
- Thomas Haigh
- et al.
- 2022
- MRS Fall Meeting 2022
Publications
26 results at MRS Fall Meeting 2022
AI Toolkit for Accelerated Nanoporous Material Discovery
- Jonathan Booth
- Daniel Cunnington
- et al.
- 2022
- MRS Fall Meeting 2022
Effects of Crystallization on the Conductance of HfOx ReRAM by In Situ TEM Method
- Alexandre Foucher
- Baoming Wang
- et al.
- 2022
- MRS Fall Meeting 2022
Deep learning inference and training using computational phase-change memory
- 2022
- MRS Fall Meeting 2022
From Amorphous to Polycrystalline Rubrene—Charge Transport in Organic Semiconductors Paralleled with Silicon
- Julie Euvrard
- Oki Gunawan
- et al.
- 2022
- MRS Fall Meeting 2022
Integrated biosensor platform based on graphene transistor arrays for real-time high-accuracy ion sensing
- Mantian Xue
- Charles Mackin
- et al.
- 2022
- MRS Fall Meeting 2022