Impact of high-NA half-field to full-field overlay performance by Monte Carlo simulations
- Romain Lallement
- Daniel Schmidt
- et al.
- 2023
- OEN 2023
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3520 results for Mathematical Sciences
EUV sub-resolution assist feature impact: experimental and simulation evaluation
- Zheng Chen
- Martin Burkhardt
- et al.
- 2023
- OEN 2023
The evolution of heterogeneous integration and packaging for the age of chiplets
- Spyridon Skordas
- 2023
- MEMS/NEMS/MOEMS 2023
Detection of Unobserved Common Cause in Discrete Data Based on the MDL Principle
- Masatoshi Kobayashi
- Kohei Miyaguchi
- et al.
- 2022
- Big Data 2022
Distributionally Robust Optimization for Input Model Uncertainty in Simulation-Based Decision Making
- Soumyadip Ghosh
- Mark S. Squillante
- 2022
- WSC 2022
Super Resolution for Turbulent Flows in 2D: Stabilized Physics Informed Neural Networks
- Mykhaylo Zayats
- Malgorzata J. Zimon
- et al.
- 2022
- CDC 2022
Symmetric Strong Duality In Continuous-time Linear Programming
- Evgeny Shindin
- 2022
- INFORMS 2022
Super-resolution of Turbulent Flows in the Absence of the High-Resolution Ground Truth
- Kyongmin Yeo
- Malgorzata Zimon
- et al.
- 2022
- INFORMS 2022
Accelerating RRAM Testing with a Low-cost Computation-in-Memory based DFT
- Abhairaj Singh
- Moritz Fieback
- et al.
- 2022
- IEEE ITC 2022
Reliability Study of 14 nm Scan Chains and Its Application to Hardware Security
- Franco Stellari
- Peilin Song
- 2022
- IEEE ITC 2022