Publications

14325 results for Physical Sciences

Acid generation efficiency prediction by bond cleavage calculation of EUV photoacid generators
- - Jayoung Koo
  - YunJi Kim
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Novel spin-on overcoat materials for EUV photoresist enhancement
- - Xisen Hou
  - Yinjie Cen
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Disruptive non-fluorinated photoacid generators using computational chemistry and library design
- - P. Labeaume
  - K. Hernandez
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Advanced EUV CAR small molecule compounds design and its impact to etch performance
- - Yinjie Cen
  - Jong Keun Park
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Impact of increasing EUV absorption of CAR polymers on lithographic performance
- - Yinjie Cen
  - Emad Aqad
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Etching of iridium thin films in chlorine- and fluorine-based inductively coupled plasmas
- - Juliano Borges
  - Hongwen Yan
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Identifying trends in photoresist polymer properties to improve line and space defects Considerations to Improve Microbridge Defectivity in EUV Chemically Amplified Photoresists
- - Benjamin D. Rafael-Naab
  - Jong Keun Park
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Complex Chemical Reaction Networks for Future Information Processing
- - Katja-Sophia Csizi
  - Emanuel Lörtscher
- 2024
- Frontiers in Neuroscience
Chemical space analysis and property prediction for carbon capture solvent molecules
- - James L. McDonagh
  - Stamatia Zavitsanou
  - et al.
- 2024
- Digital Discovery
Long indium-rich InGaAs nanowires by SAG-HVPE
- - Emmanuel Chereau
  - Gabin Grégoire
  - et al.
- 2024
- Nanotechnology