Chemical amplification for the design of sensitive E-beam and X-ray resist systems
- Hiroshi Ito
- 1990
- ACS Division of Polymer Chemistry Washington DC Meeting 1990
Publications
13 results at ACS Division of Polymer Chemistry Washington DC Meeting 1990
Polysilanes. Radiation sensitive materials for microlithography
- R.D. Miller
- 1990
- ACS Division of Polymer Chemistry Washington DC Meeting 1990
Soluble linear polysilanes by Wurtz-type coupling
- R.D. Miller
- D. Thompson
- 1990
- ACS Division of Polymer Chemistry Washington DC Meeting 1990